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Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integratedcircuit (IC) manufacturing process

Zilian QU,Yonggang MENG,Qian ZHAO

《机械工程前沿（英文）》 2015年 第10卷 第1期   页码 1-6 doi: 10.1007/s11465-015-0325-2

摘要：

This paper proposes a new eddy current method, named equivalent unit method (EUM), for the thickness measurement of the top copper film of multilayer interconnects in the chemical mechanical polishing (CMP) process, which is an important step in the integrated circuit (IC) manufacturing. The influence of the underneath circuit layers on the eddy current is modeled and treated as an equivalent film thickness. By subtracting this equivalent film component, the accuracy of the thickness measurement of the top copper layer with an eddy current sensor is improved and the absolute error is 3 nm for sampler measurement.

关键词： CMP     eddy current     multilayer wafer     Cu interconnects     equivalent unit    

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关于后摩尔时代我国集成电路制造领域的一些思考

吴汉明, 郑飞君

《工程（英文）》 2023年 第23卷 第4期   页码 33-39 doi: 10.1016/j.eng.2022.07.021

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集成电路用高纯金属溅射靶材发展研究

何金江 ,吕保国 ,贾倩,丁照崇 ,刘书芹 ,罗俊锋 ,王兴权

《中国工程科学》 2023年 第25卷 第1期   页码 79-87 doi: 10.15302/J-SSCAE-2023.01.003

摘要： His major research field is high-purity metal targets for integrated circuits.

关键词： 高纯金属；溅射靶材；集成电路；薄膜；金属化    

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Self-catalytic pyrolysis thermodynamics of waste printed circuit boards with co-existing metals

《环境科学与工程前沿（英文）》 2022年 第16卷 第11期 doi: 10.1007/s11783-022-1581-0

摘要：

● The co-existing metals in WPCBs has positive catalytic influence in pyrolysis.

关键词： Waste printed circuit board     Catalyst     Pyrolysis     Kinetics    

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Non-toxic, high selectivity process for the extraction of precious metals from waste printed circuit

《环境科学与工程前沿（英文）》 2023年 第17卷 第10期 doi: 10.1007/s11783-023-1723-z

摘要：

● Au, Ag and Pd were recovered from WPCBs with high efficiencies.

关键词： Thiosulfate     Printed circuit boards     Precious metals     Leaching     Hydrometallurgy    

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单边直线感应电机等效电路参数研究

徐伟,孙广生

《中国工程科学》 2008年 第10卷 第8期   页码 76-80

摘要：

单边直线感应电机（SLIM）相对于旋转感应电机（RIM）存在气隙大、边缘效应等，若采用RIM开路和短路试验方法，会给参数测量带来较大误差。文章提出的一种适合SLIM参数测定的新型方案，只需测量电机输入端的总功率、相电压、相电流和频率4个量，即可计算出初级电阻、初级漏感、次级电阻、次级漏感、气隙电感和铁损电阻。电机的特性分析表明，该方法真实有效，具有一定的参考价值。

关键词： 单边直线感应电机     开路试验     短路试验     参数测量     等效电路    

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Direct writing of electronics based on alloy and metal (DREAM) ink: A newly emerging area and its impact on energy, environment and health sciences

Qin ZHANG, Yi ZHENG, Jing LIU

《能源前沿（英文）》 2012年 第6卷 第4期   页码 311-340 doi: 10.1007/s11708-012-0214-x

摘要： Electronics, such as printed circuit board (PCB), transistor, radio frequency identification (RFID), organic light emitting diode (OLED), solar cells, electronic display, lab on a chip (LOC), sensor, actuator, and transducer etc. are playing increasingly important roles in people’s daily life. Conventional fabrication strategy towards integrated circuit (IC), requesting at least six working steps, generally consumes too much energy, material and water, and is not environmentally friendly. During the etching process, a large amount of raw materials have to be abandoned. Besides, lithography and microfabrication are typically carried out in “Cleanroom” which restricts the location of IC fabrication and leads to high production costs. As an alternative, the newly emerging ink-jet printing electronics are gradually shaping modern electronic industry and its related areas, owing to the invention of a series of conductive inks composed of polymer matrix, conductive fillers, solvents and additives. Nevertheless, the currently available methods also encounter some technical troubles due to the low electroconductivity, complex sythesis and sintering process of the inks. As an alternative, a fundamentally different strategy was recently proposed by the authors’ lab towards truly direct writing of electronics through introduction of a new class of conductive inks made of low melting point liquid metal or its alloy. The method has been named as direct writing of electronics based on alloy and metal (DREAM) ink. A series of functional circuits, sensors, electronic elements and devices can thus be easily written on various either soft or rigid substrates in a moment. With more and more technical progresses and fundamental discoveries being kept made along this category, it was found that a new area enabled by the DREAM ink electronics is emerging, which would have tremendous impacts on future energy and environmental sciences. In order to promote the research and development along this direction, the present paper is dedicated to draft a comprehensive picture on the DREAM ink technology by summarizing its most basic features and principles. Some important low melting point metal ink candidates, especially the room temperature liquid metals such as gallium and its alloy, were collected, listed and analyzed. The merits and demerits between conventional printed electronics and the new direct writing methods were comparatively evaluated. Important scientific issues and technical strategies to modify the DREAM ink were suggested and potential application areas were proposed. Further, digestions on the impacts of the new technology among energy, health, and environmental sciences were presented. Meanwhile, some practical challenges, such as security, environment-friendly feature, steady usability, package, etc. were summarized. It is expected that the DREAM ink technology will initiate a series of unconventional applications in modern society, and even enter into peoples’ daily life in the near future.

关键词： direct writing of electronics based on alloy and metal (DREAM) ink     direct writing of electronics     printed electronics     liquid metal ink     integrated circuit     consumer electronics     nano liquid metal    

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Equivalent circuit and characteristic simulation of a brushless electrically excited synchronous wind

Hao WANG, Fengge ZHANG, Tao GUAN, Siyang YU

《机械工程前沿（英文）》 2017年 第12卷 第3期   页码 420-426 doi: 10.1007/s11465-017-0439-9

摘要：

A brushless electrically excited synchronous generator (BEESG) with a hybrid rotor is a novel electrically excited synchronous generator. The BEESG proposed in this paper is composed of a conventional stator with two different sets of windings with different pole numbers, and a hybrid rotor with powerful coupling capacity. The pole number of the rotor is different from those of the stator windings. Thus, an analysis method different from that applied to conventional generators should be applied to the BEESG. In view of this problem, the equivalent circuit and electromagnetic torque expression of the BEESG are derived on the basis of electromagnetic relation of the proposed generator. The generator is simulated and tested experimentally using the established equivalent circuit model. The experimental and simulation data are then analyzed and compared. Results show the validity of the equivalent circuit model.

关键词： wind power     brushless electrically excited synchronous generator     hybrid rotor     equivalent circuit    

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Copper recovery from waste printed circuit boards concentrated metal scraps by electrolysis

Xiaonan Liu, Qiuxia Tan, Yungui Li, Zhonghui Xu, Mengjun Chen

《环境科学与工程前沿（英文）》 2017年 第11卷 第5期 doi: 10.1007/s11783-017-0997-4

摘要： Copper recovery is the core of waste printed circuit boards (WPCBs) treatment. In this study, we proposed a feasible and efficient way to recover copper from WPCBs concentrated metal scraps by direct electrolysis and factors that affect copper recovery rate and purity, mainly CuSO ·5H O concentration, NaCl concentration, H SO concentration and current density, were discussed in detail. The results indicated that copper recovery rate increased first with the increase of CuSO ·5H O NaCl, H SO and current density and then decreased with further increasing these conditions. NaCl, H SO and current density also showed a similar impact on copper purity, which also increased first and then decreased. Copper purity increased with the increase of CuSO ·5H O. When the concentration of CuSO ·5H O, NaCl and H SO was respectively 90, 40 and 118 g/L and current density was 80 mA/cm , copper recovery rate and purity was up to 97.32% and 99.86%, respectively. Thus, electrolysis proposes a feasible and prospective approach for waste printed circuit boards recycle, even for e-waste, though more researches are needed for industrial application.

关键词： Waste printed circuit boards (WPCBs)     Copper     Recovery rate     Purity     Electrolysis    

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Copper fractal growth during recycling from waste printed circuit boards by slurry electrolysis

《环境科学与工程前沿（英文）》 2021年 第15卷 第6期 doi: 10.1007/s11783-021-1405-7

摘要：

• Copper fractal growth was observed during WPCBs recycling by slurry electrolysis.

关键词： Dendritic copper     Fractal growth     WPCBs     Slurry electrolysis    

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具有双支路交错拓扑结构和轻载效率优化模式的大电流、高集成度开关电容分压器 Research Articles

刘胜1,赵梦恋2,杨朝2,吴皓楠2,吴晓波1

《信息与电子工程前沿（英文）》 2022年 第23卷 第2期   页码 317-327 doi: 10.1631/FITEE.2000404

摘要： 由于无磁且容易实现高集成度，开关电容（SC）变换器作为一种直流变压器在现代电子领域具有广泛应用前景。然而，设计具有大电流和高功率的SC变换器仍面临挑战。本文提出一种双支路SC分压器拓扑，并通过集成电路（IC）得以实现。所设计SC变换器能驱动大电流负载，将其使用范围扩展至大功率应用场合。该SC变换器具有1/2的恒定变换比，其双支路交错操作方式可确保输入电流的连续性。此外，提出一种使用电容耦合型浮动电压电平转换器的片上栅极驱动方法有效驱动全NMOS功率链。通过自供电结构，飞电容器本身也是用于栅极驱动的自举电容器，从而减少所需元器件数量。采用数字调制方式，在轻载时自动降低开关频率以提高效率。所设计SC变换器IC使用180 nm三阱BCD工艺制造。实验结果证明了所提双支路交错操作方式和自供电栅极驱动方法的有效性。所设计SC变换器可在5至12 V的输入电压下驱动高达4 A的负载电流，功率效率高达96.5％。在轻负载条件下，使用所提优化方法，电源效率提高了30％。

关键词： 开关电容变换器；双支路；集成电路；自举栅极驱动器    

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Enhancement of open circuit voltage in organic solar cells by doping a fluorescent red dye

Qing LI, Junsheng YU, Yue ZANG, Nana WANG, Yadong JIANG

《能源前沿（英文）》 2012年 第6卷 第2期   页码 179-183 doi: 10.1007/s11708-012-0177-y

摘要： The open circuit voltage ( ) of small-molecule organic solar cells (OSCs) could be improved by doping suitable fluorescent dyes into the donor layers. In this paper, 4-(dicyanomethylene)-2-t-butyl-6-(1,1,7,7-tetramethyljulolidyl-9-enyl)-4H-pyran (DCJTB) was used as a dopant, and the performance of the OSCs with different DCJTB concentration in copper phthalocyanine (CuPc) was studied. The results showed that the of the OSC with 50% of DCJTB in CuPc increased by 15%, compared with that of the standard CuPc/fullerene (C ) device. The enhancement of the was attributed to the lower highest occupied molecular orbital (HOMO) level in the DCJTB than that in the CuPc. Also, the light absorption intensity is enhanced between 400 and 550 nm, where CuPc and C have low absorbance, leading to a broad absorption spectrum.

关键词： organic solar cells (OSCs)     open circuit voltage     fluorescent dye doping     4-(dicyanomethylene)-2-t-butyl-6-(1     1     7     7-tetramethyljulolidyl-9-enyl)-4H-pyran (DCJTB)    

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A critical review on the recycling of copper and precious metals from waste printed circuit boards using

Zebing Wu, Wenyi Yuan, Jinhui Li, Xiaoyan Wang, Lili Liu, Jingwei Wang

《环境科学与工程前沿（英文）》 2017年 第11卷 第5期 doi: 10.1007/s11783-017-0995-6

摘要： Currently, increasing amounts of end-of-life (EoL) electronic products are being generated due to their reduced life spans and the unavailability of suitable recycling technologies. In particular, waste printed circuit boards (PCBs) have become of global concern with regard to environmental issues because of their high metal and toxic material contents, which are pollutants. There are many environmental threats owed to the disposal of electronic waste; off-gasses, such as dioxins, furans, polybrominated organic pollutants, and polycyclic aromatic hydrocarbons, can be generated during thermal treatments, which can cause serious health problems if effective off-gas cleaning systems are not developed and improved. Moreover, heavy metals will dissolve, and release into the ground water from the landfill sites. Such waste PCBs contain precious metals which are of monetary value. Therefore, it is beneficial to recover the metal content and protect the environment from pollution. Hydrometallurgy is a successful technique used worldwide for the recovery of precious metals (especially gold and silver) from ores, concentrates, and waste materials. It is generally preferred over other methods because it can offer high recovery rates at a relatively low cost. This article reviews the recent trends and developments with regard to the recycling of precious metals from waste PCBs through hydrometallurgical techniques, such as leaching and recovery.

关键词： Waste PCBs     Precious metals     Hydrometallurgy     Recycling     Leaching     Recovery    

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具有超小弯曲半径的10通道硅基集成模分复用器件 Special Feature on Optoelectronic Devices and Inte

Chen-lei LI, Xiao-hui JIANG, Yung HSU, Guan-hong CHEN, Chi-wai CHOW, Dao-xin DAI

《信息与电子工程前沿（英文）》 2019年 第20卷 第4期   页码 498-506 doi: 10.1631/FITEE.1800386

摘要： 为实现多通道片上信号传输，设计一种多模硅光集成器件（PIC），包括一对10通道片上模式多路复用—解复用器以及具有超小弯曲半径的总线波导。选择多模总线波导宽度使其能支持10种模式，其中包括4种横磁（TM）和6种横电（TE）偏振模式。多模总线波导由基于修正的欧拉曲线超小弯曲半径组成。实验结果表明，即使组成总线波导的弯曲半径仅为40 μm，该芯片仍可在大带宽1520−1610 nm上实现10通道传输，且具有约−20 dB的低模间串扰。与传统弯曲半径相同的圆弧弯曲相比，该集成器件有明显优势。

关键词： 硅；多模；光波导；欧拉曲线    

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面向大规模MIMO系统的高效功率放大器及其线性化技术综述 Review Articles

Xin LIU, Guan-sheng LV, De-han WANG, Wen-hua CHEN, Fadhel M. GHANNOUCHI

《信息与电子工程前沿（英文）》 2020年 第21卷 第1期   页码 72-96 doi: 10.1631/FITEE.1900467

摘要： 为适应数据传输速率的爆炸性增长以及大规模多输入多输出（mMIMO）技术的应用，业界开发了高效率功率放大器（PA）和相关线性化技术。本文根据5G系统的两个核心频段——sub-6 GHz和毫米波（mmWave）——的特点，对高效率集成化的Doherty功放单片微波集成电路（MMIC）和线性化技术进行了综述，比较和分析了不同半导体工艺和架构下的高效功放设计思路。由于5G协议尚未最终确定，大规模MIMO系统中的功放规范仍在考虑中，有必要研究新的设计方法以进一步提高其效率和线性性能。此外，数字预失真线性化技术需要发展，以适应大规模MIMO系统，并且需要一些创新的线性增强技术来同时提高补偿精度和降低功耗。

关键词： 高效节能；线性化；大规模多输入多输出（mMIMO）；单片微波集成电路（MMIC）；功率放大器    

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标题 作者 时间 类型 操作

Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integratedcircuit (IC) manufacturing process

Zilian QU,Yonggang MENG,Qian ZHAO

期刊论文

关于后摩尔时代我国集成电路制造领域的一些思考

吴汉明, 郑飞君

期刊论文

集成电路用高纯金属溅射靶材发展研究

何金江 ,吕保国 ,贾倩,丁照崇 ,刘书芹 ,罗俊锋 ,王兴权

期刊论文

Self-catalytic pyrolysis thermodynamics of waste printed circuit boards with co-existing metals

期刊论文

Non-toxic, high selectivity process for the extraction of precious metals from waste printed circuit

期刊论文

单边直线感应电机等效电路参数研究

徐伟,孙广生

期刊论文

Direct writing of electronics based on alloy and metal (DREAM) ink: A newly emerging area and its impact on energy, environment and health sciences

Qin ZHANG, Yi ZHENG, Jing LIU

期刊论文

Equivalent circuit and characteristic simulation of a brushless electrically excited synchronous wind

Hao WANG, Fengge ZHANG, Tao GUAN, Siyang YU

期刊论文

Copper recovery from waste printed circuit boards concentrated metal scraps by electrolysis

Xiaonan Liu, Qiuxia Tan, Yungui Li, Zhonghui Xu, Mengjun Chen

期刊论文

Copper fractal growth during recycling from waste printed circuit boards by slurry electrolysis

期刊论文

具有双支路交错拓扑结构和轻载效率优化模式的大电流、高集成度开关电容分压器

刘胜1,赵梦恋2,杨朝2,吴皓楠2,吴晓波1

期刊论文

Enhancement of open circuit voltage in organic solar cells by doping a fluorescent red dye

Qing LI, Junsheng YU, Yue ZANG, Nana WANG, Yadong JIANG

期刊论文

A critical review on the recycling of copper and precious metals from waste printed circuit boards using

Zebing Wu, Wenyi Yuan, Jinhui Li, Xiaoyan Wang, Lili Liu, Jingwei Wang

期刊论文

具有超小弯曲半径的10通道硅基集成模分复用器件

Chen-lei LI, Xiao-hui JIANG, Yung HSU, Guan-hong CHEN, Chi-wai CHOW, Dao-xin DAI

期刊论文

面向大规模MIMO系统的高效功率放大器及其线性化技术综述

Xin LIU, Guan-sheng LV, De-han WANG, Wen-hua CHEN, Fadhel M. GHANNOUCHI

期刊论文